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    Technometrics

    Technometrics

    JournalISSN 0040-1706eISSN 1537-2723中科院 工程技术 2区

    年发文量

    研究主题

    论文(7616)

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    1Model-Based Prior for Model-Free Reinforcement Learning in Process Control: an Offline Methodology for Semiconductor Manufacturing
    Yanrong Li,Fugee Tsung,Wei Jiang,Juan Du,Zhi-Sheng Ye

    Process control is essential in advanced manufacturing to minimize variations caused by disturbances from manufacturing environments. As precision requirements continue to rise, process models have become increasingly complex, making it difficult for model-based controllers to accurately characterize the relationship between control inputs and system outputs. Meanwhile, unstable and unobservable disturbances, which are inevitable during manufacturing processes, introduce significant variations for model-free controllers. To address this challenge, this work develops a novel model-free reinforcement learning (RL) control approach that leverages model-based prior knowledge. Although prior knowledge cannot define the process model, it helps simplify the model structure and reduce variations in model-free controllers. Unlike traditional RL methods that require extensive real-time experimentation, we introduce an offline RL approach that consists of offline learning and online control phases and relies solely on fixed historical data. During the offline learning phase, nonparametric regression is employed to approximate the unknown process, while Gaussian process is used to predict disturbances. These two methods are integrated with a policy-gradient-search RL algorithm in online control. Theoretical properties of our control methodology are discussed. Simulations and a crystallization case study are conducted to validate the effectiveness of the proposed method.

    2026
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    2A Modified Test for Linear Hypotheses in Multivariate Functional Data under Heteroscedasticity and Small Samples
    Tianming Zhu
    2026
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    3Hamming Weight Uniform Designs for Order-of-Addition Experiments
    Yuwei Song,Min-Qian Liu,Jianbin Chen
    2026
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    4Planning Dual-Stress Accelerated Degradation Tests with Random-Effects Wiener Process Models
    Guanqi Fang, Xi He, Yizi Wang,Rong Pan
    2026
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    5Nonlinear Spatio-Temporal Run-to-Run Control: Leveraging Diffusion Models for Disturbance Management
    Zihan Zhang, Lingchao Mao,Jianjun Shi,Kamran Paynabar

    Run-to-run (R2R) control is widely used in advanced manufacturing. Conventional R2R control methods often assume that system disturbances exhibit linear structures or low-rank approximations in high-dimensional data, such as images or videos. While these assumptions facilitate implementation, they limit the effectiveness of R2R control in managing sophisticated manufacturing processes with intricate nonlinear disturbances. To address these challenges, we propose a novel nonlinear spatio-temporal R2R control framework that estimates system disturbances using a diffusion model and applies control actions to compensate for them. The proposed approach integrates an offline modeling phase to capture disturbance dynamics and an online control phase that dynamically adjusts control actions to minimize deviations from the target system response. Unlike conventional deterministic control strategies, the proposed method explicitly quantifies uncertainty, enabling more robust and informed decision-making. The effectiveness of this method is validated through simulation studies and a case study, demonstrating its adaptability in complex, high-dimensional environments.

    2026
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    高被引作者

    作者引用发文
    Brian D. Ripley571682
    Alan Agresti525963
    Maria Kateri467041
    w n venables460661
    Donald B. Rubin440393
    Roderick Joseph Alexander Little440051
    john w tukey329731
    Steven Kay321431
    Maurice G. Kendall320341
    Rw Kennard293887

    高产作者

    作者引用发文
    Eric R Ziegel25150176
    Stan Lipovetsky244545
    William Q Meeker681944
    Norman R. Draper1373142
    V. Roshan Joseph129039
    C. F. Jeff Wu341632
    Stan Lipovetsky24732
    Peihua Qiu123931
    Lj Bain259130
    Dennis Cook897627

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