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    Journal of the Vacuum Society of Japan

    Journal of the Vacuum Society of Japan

    JournalISSN 1882-2398eISSN 1882-4749

    年发文量

    研究主题

    论文(1080)

    排序
    1Development of Simple Fabrication Method of SiO2 Diaphragm Using Inward Plasma Etching
    Ryo KANOU,Hiroshi SUGA,Shun'ichiro SHIMBORI,Satoshi TAKAHASHI,Toshitaka KUBO,Atsushi ANDO,Tetsuo SHIMIZU,Jun MIYAWAKI
    2017
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    277Th IUVSTA Workshop on Surface Processes, Gas Dynamics, and Vacuum Technology of Cryogenic Vacuum Systems
    Ichiro ARAKAWA
    2017
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    3Bonding of Dissimilar Semiconductor Materials for Energy-Harvesting and Energy-Saving Devices
    Naoteru SHIGEKAWA

    Research activities on surface activated bonding (SAB) of dissimilar semiconductor materials for targeting advanced energy-harvesting and energy-saving devices are reviewed.The structural and electrical properties of interfaces fabricated using the SAB technologies are examined.The change in the interface characteristics due to annealing after bonding is highlighted.The characteristics of SAB-based hybrid multi-junction solar cells, SiC/Si junctions as prototypes of wide bandgap/narrow bandgap hetero structures, and single-crystal diamond/Si junctions for integrating diamond and Si devices in the future are discussed.

    2017
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    4Surface Potential Measurements of Organic Thin-Film Transistors by Kelvin-Probe Force Microscopy
    Kei KOBAYASHI,Hirofumi YAMADA

    Kelvin-probe force microscopy (KPFM) is a surface potential mapping technique based on dynamic-mode atomic force microscopy (AFM).It is useful to visualize carrier injection barriers and trapped charges in operating organic thin-ˆlm transistors (OTFTs).Since it is desirable to perform KPFM experiments in vacuum conditions, frequency modulation (FM) technique is often used to operate AFM/KPFM.We review two operating modes of KPFM using FM-AFM in vacuum and demonstrate visualization of the carrier injection barriers and trapped charges in OTFTs.We also introduce a method to visualize the transient distribution of the trapped charges being evacuated from the channel of the operating OTFT.

    2017
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    5Material Production Technology for Oxide Semiconductor Gas Sensors: Recent Research Progress
    Masatoshi KITAMURA

    Oxide-semiconductor based gas sensors have been intensively investigated in order to improve the sensitivity and selectivity of a certain gas. This article reviews the recent research progress of gas sensors having oxide semiconductor as an active layer, in particular detecting for H2 and volatile organic compounds. The semiconductor material for gas sensors reported in this article includes SnO2, WO3, ZnO, In2O3, and NiO. The sensitivity of gas sensors having diŠerent structures and semiconductors is compared.

    2017引用:3
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    立即登录,查看全部 1080 篇论文

    高被引作者

    作者引用发文
    Tomoaki Hino11810
    Wilson Agerico Diño1015
    Kazuhiko Mase8923
    Motofumi Suzuki874
    Hiroshi Nakanishi786
    Yuji Yamauchi728
    Akiko N. Itakura708
    Yuko Hirohata693
    Y. Suetsugu6812
    Kaoru Nakajima673

    高产作者

    作者引用发文
    Kazuhiko Mase8923
    Norio Ogiwara3017
    Hitoshi Akimichi5213
    Y. Suetsugu6812
    Junichiro Kamiya1912
    hideaki kasai3211
    Takanori Aoki1210
    Michikazu Kinsho1110
    Hajime Yoshida1910
    Tomoaki Hino11810

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