Анализ методов экспресс-контроля чистоты поверхности

In this paper analyzes the main methods for rapid assessment of surface cleanliness of dielectric substrates. Shown that the most convenient for the rapid assessment of surface cleanliness is a device based on the method by measuring tribometer sliding friction coefficient. The device is characterized by easy-to-use design, the short duration of the measurement process and, as will be shown below, does not require for their calibration of the reference surfaces and clean the surface of the indenter probe-specific technologies.