Казанский физико-технический институт им. Е.К. Завойского
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摘要
The arrays of permalloy micron-sized particles with configurational anisotropy of shape was made by microsphere lithography technique. The properties of the particles were studied by atomic-force microscopy and magnetic-force microscopy. The magnetization distribution in particles was studied depending on the size of microspheres used in lithography process. The computer simulation of magnetic-force images of the particles was carried out. The quantitative and qualitative comparisons of shapes, sizes and reproducibility of particles fabricated by microsphere lithography and scanning probe lithography was performed.