A High-Voltage Cmos Vlsi Programmable Fluidic Processor Chip

A high-voltage (HV) SOI CMOS VLSI chip has been demonstrated to transport droplets on programmable paths across its coated surface. This HV exciter for a fluidic labon-a-chip system creates dielectrophoretic forces that move and help inject droplets. Electrode excitation voltage and frequency are variable: at 100V, f(ELECmax) = 200Hz. Data communication rate is variable up to 250kHz. This 10,377 mu m-by-8210 mu m demonstration chip has a 32x32 array of nominally 100V electrode drivers dissipating 1.87W max.