A Statistical Algorithm for 3D Capacitance Extraction

A Brambilla,P Maffezzoni

IEEE Microwave and Guided Wave Letters（2000）

Politecn Milan

被引用25|浏览6

摘要

This letter deals with the problem of parasitic capacitance extraction in deep suhmicron layouts having general geometries. The presented extraction method is based on the statistical floating random walk algorithm. It employs a suitable spherical Green's function that, in a charge free region, relates the electrical field in the sphere center to the surface electrical potential

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关键词

capacitance measurement,Laplace equation