An experimental plasmochemical apparatus is described to study physical and chemical processes in gas flows with a wide range of physical states and parameters; knowledge about this is necessary when developing promising vacuum technologies. The equipment allows investigation of supersonic improperlyexpanded jets, interaction of jets with barriers, kinetics of discharge-initiated plasmochemical reactions, an ionic or electron beam in condensing flows of gases and gas mixtures, relaxation, cluster formation and condensation processes, as well as modeling a nozzle flow in a wide range of gas-dynamics parameters. The apparatus is equipped with modern measuring instrumentation and a set of optical, electronic, ionic, chromatographic, and mass-spectrometric systems.
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