Atomic Layer Deposition: an Overview

ADVERTISEMENT RETURN TO ISSUEPREVReviewNEXTAtomic Layer Deposition: An OverviewSteven M. George*View Author Information Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309* E-mail address: [email protected].Cite this: Chem. Rev. 2010, 110, 1, 111–131Publication Date (Web):November 30, 2009Publication History Received12 February 2009Published online30 November 2009Published inissue 13 January 2010https://pubs.acs.org/doi/10.1021/cr900056bhttps://doi.org/10.1021/cr900056breview-articleACS PublicationsCopyright © 2009 American Chemical SocietyRequest reuse permissionsArticle Views67656Altmetric-Citations4604LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InRedditEmail Other access optionsGet e-Alertsclose SUBJECTS:Atomic layer deposition,Deposition,Oxides,Precursors,Surface reactions Get e-Alerts