The corrosion resistance of stainless steels exposed to humid environment is closely related to the surface oxide film. To date, the formation process and its correlation with the alloy defects are still unclear. The present study, using in-situ atomic-scale TEM characterization, reveals the growth process of oxide film on a fresh steel surface. The oxide formation involves the oxygen adsorption, the inward diffusion into alloy lattice, and the outward expansion of stable oxide film. The metal-oxide solid transformation is found to be promoted by the lattice strain of the alloy. The atomic structures of the oxides are imaged and analyzed.