We design and fabricate polarization-dependent components (PDCs) based on all-dielectric, fully planarized, multilayer microstructures of 150 nm period by using low-loss materials. Quarter-wave and half-wave phase plates at 405 nm are presented. Multifunction integrated diffractive PDCs are discussed
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composite microstructures,planarization,high aspect ratio gratings,reliability of nano structures,multilayer integration,retarders,imprint
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