Digital Modelling of a Massively Parallelized Multiphoton Polymerization Plot Process

Multi-photon polymerization (MPP) is widely recognised as promising approach for the fabrication of fully 3D micro- or nano-metric structures, occurring for example in 3D optical metasurfaces. However, increases in fabrication speed by parallelizing the write process are required to facilitate industrial scale application. We present our work on the adaptation of a photolithography simulator, Dr LITHO, to model the DOE and SLM parallelised MPP process in a novel photoplotter currently developed in the EU Fabulous project, including the calibration of key simulator parameters using feedback from the parallel MPP fabrication of different test structures.