Effects of Hydrogen Plasma on the Surface Morphology and Associated Properties of Piezoelectric PZT Ceramics

Results of the X-ray diffraction and scanning electron microscopic analysis of morphological changes in the piezoelectric PZT ceramic surface before and after plasma irradiation are presented. It is shown that repeated exposure to high energy density hydrogen plasma flows leads to a significant change in the structure and elemental composition of the near-surface layer. At the same time, bulk piezoelectric properties of the material change only slightly. The mechanism of surface modification and its relationship with the change/preservation of the basic physical properties of PZT piezoelectric ceramics are discussed.