We report on the design of a system used to measure the multispectral intrapixel response of imaging sensor arrays. An Airy disk spot size of approximately 4 mu m has been achieved for wavelength bands that extend from the visible blue to near infrared. The automated system does rapid intrapixel row and/or column spatial mapping of individual pixels as well as rastered two-dimensional spatial scans over multi-pixel grids. Commercially available equipment including a photometric eyepiece, a reflective objective, programmable pushers, and light-emitting diodes (LEDs) (at various wavelengths from the near ultraviolet to the near infrared) are utilized in the system. Scanned results using the system are presented for both front- and back-illuminated charge-coupled device (CCD) imagers. The intrapixel response of a front-illuminated device shows good correlation with the physical cross section of the devices tested.
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