We report here on the fabrication of a novel silicon microfluidic system dedicated to protein sample preparation prior to their on-line analysis by electrospray and mass spectrometry (ESI-MS). The microsystem includes several main modules such as a digestion cell, an elution column, a pumping system as well as an integrated nano-ESI source, whose realization reflects our technological choice. After a brief introduction on the overall microsystem, we describe the conception of the different modules including the description and the accounting for the retained technological alternatives, their development and the first realizations.
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