Nano-structuring with Laser Illuminated Scanning Probe Tip Array

Nano-structuring of various materials is important for a number of future oriented technical applications. Local intensity enhancement of laser irradiation in the near field of a SPM tip enables the processing of sub-diffraction limit features. The tip-sample gap, which is a critical parameter for the field enhancement needs to be very precisely controlled. In the present work, the design of lateral motion comb drive for the sub-nanometer precision gap control is focused. The practical implementation of such a nanostructuring system can be realized only by utilizing one-dimensional array structures of tips simultaneously operating in their respective cells. The nano-positioning device with its sub-nanometer resolution proves to be an efficient tool for the precise control of the enhanced field and hence of the feature produced.