PID-controller application in the system for variable technological process

Baranov, S.,Cojuhari, I.,Fiodorov, I.,Gorceac, L.

Development and Application Systems（2014）

Sci. & Eng. Centre Informinstrument

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摘要

This report concerns the automatic control system based on the programmable controller TRM-151-01 of the temperature of semiconductor alloying with zinc and tellurium. The goal of the research is the industrial modernization of the epitaxial growth technology of semiconductor materials in the form of thin multiple layers (inclusively nano-dimensions) with variable values of the electric conductibility.

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关键词

programmable controllers,semiconductor industry,three-term control,pid controller application,automatic control system,electric conductibility,epitaxial growth technology,industrial modernization,programmable controller trm-151-01,semiconductor alloying,semiconductor materials,tellurium,thin multiple layers,variable technological process,zinc,automation,epitaxial layer,gallium compounds,tellurium alloy,zinc alloy,metals,oscillators,gallium arsenide,process control,epitaxial growth

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