Reliable Solid Modeling for Three-Dimensional Semiconductor Process and Device Simulation

Since general-purpose 3D process simulators are currently not available, solid modelers greatly help the designer in building geometries for device simulators. In this contribution, a solid modeler is presented that allows reliable geometrical operations. In order to avoid numerical errors occurring at the intersection of objects built with polygons, we have chosen a data structure based on a discretization of the x-y plane of the simulation domain