Scandium-Doped Polycrystalline AIN Thin Film Pyroelectric Detector with Candle Soot-Au Nano Absorption Layer

In this paper, polycrystalline Sc0.2Al0.8N pyroelectric thin films with (002) orientation as the main orientation were prepared on Si-SiO2-Mo substrates using direct current reactive magnetron sputtering with an Sc0.2Al0.8 target, and a pyroelectric detector was designed and fabricated. The test results shows that the pyroelectric coefficient is stable around 15 mu C.m(-2).K-1 at 35-70 degrees C, the dielectric constant was 15.76 at 1 kHz, the dielectric loss was 0.052. Thermoelectric devices based on Sc0.2Al0.8N thin films were prepared using MEMS technology. To further enhance the absorption rate of the mid infrared band, candle soot and candle soot-Au nano absorption layers were developed and prepared. The test results show that the candle soot-Au nano absorption layer has an absorption rate close to 100% in the 3-8 mu m band, and the device with integrated candle soot absorption layer has an absorption rate better than 90% in the 3-8 mu m band. The device's pyroelectric response current is also tested.