Thin Film Systems: Basic Aspects

This chapter contains sections titled: Interconnects for Microelectronics Introduction Metallization Layers Materials Science of Metallic Interconnects Function of Barrier and Nucleation Layers and Materials Selection Metallization Structures in Acoustoelectronics Introduction Fundamentals of Surface Acoustic Waves Interdigital Transducers (IDTs) Reflector Gratings Waveguides, Energy Trapping Multistrip Couplers Silicide Layers for Electronics Introduction The Basic Chemical and Physical Properties Preparation of Silicides Silicides with Metallic Conductivity Semiconducting Silicides Heterogeneously Disordered Silicide Films Complex Layered Systems for Magnetoelectronics Introduction Magnetism: A Primer Magnetic Coupling Phenomena Electric Transport in Layered Magnetic Systems Functional Thin Film Systems Multilayer and Single-Surface Reflectors for X-Ray Optics Introduction Refraction and Reflection at Single Boundaries BRAGG Reflection at 1D Lattice Systems Multilayer Preparation References