Three‐Dimensional Microsensor Technology

The prelims comprise: The Basic Concepts of the LIGA Technique Modifications and Extensions of the LIGA Technique Microstructures in the LIGA Technique The Microspectrometer in the LIGA Technique The Acceleration Sensor in the LIGA Technique Micropump Manufactured by Thermoplastic Molding Optochemical Sensor Systems for Detection of Toxic Substances in Gases and Liquids Electrochemical Microanalytical System (ELMAS) for the Ionometry of Liquid Media Concepts for Miniaturized Analytical Microprobes: Integrated Optical NIR Evanescent Wave Sensor System for Chemical Analysis Near Field Thermal Lens System Chemical Microanalyzer Systems: Their Role and Importance in Modern Chemical Analysis in Environmental Workplace and Process Control and Medical Diagnosis: a Résumé References