Three-dimensional Silicon Electrostatic Linear Microactuator

In this paper, the fabrication of a three-dimensional (3D) silicon linear microactuator is described. This actuator is realized by anisotropic chemical etching of a (110)-oriented silicon wafer. The silicon monolithic structure of the microactuator comprises a fixed part bonded onto a glass substrate and a movable part suspended from two elastic beams. The displacement of the movable part is consequently frictionless, driven by electrostatic forces. We present the steps of the etching process and initial results concerning mechanical and electrostatic tests. Finally, some projected applications are discussed.