Исследование Параметров Сверхпроводящих И Изолирующих Элементов Структур, Получаемых На Пленках YBCO Методом Задающей Маски, При Уменьшении Их Размеров

This article is devoted to the study of the electrophysical parameters of superconducting and insulating elements of planar structures manufactured by the preliminary topology mask method based on the high-temperature superconductor YBa2Cu3O7-d, when the size of the elements is reduced to values of the order of one micrometer. Using standard photolithography by the preliminary topology mask method, structures with superconducting elements with a width of 2 microns and parameters sufficient for instrument applications are obtained.