Provided is a mass flow controller, including a control module (300), a fluid passage, a flow regulating valve (200), a flow sensor (400) disposed between an inlet and the flow regulating valve (200), and a pressure sensor (500) disposed at an outlet. The control module (300) is configured to enter a pressure feedback regulation mode when a variation amount of a target flow value exceeds a preset threshold, and enter a flow feedback regulation mode after a fluid flow value detected by the flow sensor (400) meets a first stabilization condition. The control module (300) is configured to, in the pressure feedback regulation mode, perform a calculation according to a fluid pressure value and the target flow value to obtain an opening regulation amount of the flow regulating valve (200), and regulate an opening degree of the flow regulating valve (200) according to the opening regulation amount; and the control module (300) is configured to, in the flow feedback regulation mode, perform a calculation according to the fluid flow value and the target flow value to obtain an opening regulation amount of the flow regulating valve (200), and regulate the opening degree of the flow regulating valve (200) according to the opening regulation amount. Thus, quick response can be realized while flow control precision is ensured.
