The device has a treatment chamber (10), which can be evacuated and which contains a plasma generation device, and a processing chamber (11) connected to the treatment chamber by a gas-tight door or lock (12,30).
The processing chamber contains a cutting processing device (20). The workpiece is conveyed between the two chambers by a transport device. The chamber separating door is a rotary door (30) which also forms a workpiece carrier.
ADVANTAGE -Enables processing of workpieces which are extremely sensitive to contamination.
