Summary form only given. This study presents the first detail 3-D full modeling of all physical processes in laser-produced plasma (LPP) for various applications. The evolution of the target in 3-D full hydrodynamic response coupled with 3-D photon transport in the LPP with detail atomic physics are simulated for multiple-laser on target systems. For example, several concepts are considered in utilizing a high-power laser to generate plasma that emits photons in the EUV region for lithography to support the throughput requirements of high-volume manufacturing lithography exposure tools. The typical for most LPP devices is providing the initial heating (with possible simultaneous compression) of solid or liquid targets to the temperatures required for generating the radiation in the EUV region. After a short laser pulse with tau=10-50 ns, the energy of the external laser radiation is partly transmitted deeper into the target, partly absorbed by the target plasma, and partly reflected at the plasma-vacuum interface. An integrated model for the description of hydrodynamics and optical processes in a LPP device has been developed and integrated into the HEIGHTS-LPP computer simulation package. Model development consisted of three main tasks: laser absorption induced plasma evolution and magnetohydrodynamic (MHD) processes; detailed photon radiation transport, and physics of plasma expansion. Advanced numerical methods for the description of target compression in various geometries are used in the HEIGHTS package. For opacity calculations several models have been developed and implemented. Radiation transport of both continuum and lines is taken into account with detailed spectral profiles in the EUV region. A multi-group approximation of opacities with detail resolution of several thousand strong spectral lines is used. Radiation transport in LPP devices is solved using two different methods, i.e., by direct integration of the transport equation and by 3-D Monte Carlo - echniques. The models and theories developed in this work and implemented in HEIGHTS-LPP will be used to explain recent LPP experiments to understand role of different physical processes causing fast ions generation and the flux of such ions. In addition, parameters such as target design and laser pulse shape should be optimized to find in future devices better target design and a relevant laser pulse shape. The HEIGHTS-LPP package can also study detailed hydrodynamic and radiation processes in various LPP devices as a function of laser energy, wavelength, and dimensions to optimize brightness throughput
Summary form only given. Both laser and discharge produced plasma such as Z-pinch devices are being used as a light source for EUV lithography. A key challenge for discharge produced plasma (DPP) devices is achieving sufficient brightness to support the throughput requirements of high-volume manufacturing (HVM) lithography exposure tools. An integrated model for the description of hydrodynamics and optical processes in a DPP device has been developed and integrated into the HEIGHTS-EUV computer simulation package. Model development consisted of three main tasks: plasma evolution and MHD processes; detailed photon radiation transport, and physics of plasma/electrode interactions in DPP devices. Plasma flows have multidimensional character in pinch systems. Advanced numerical methods for the description of magnetic compression and diffusion in a cylindrical geometry are used in the HEIGHTS package. Radiation transport of both continuum and lines is taken into account with detailed spectral profiles in the EUV region. Radiation transport is solved using two different methods. Discharges using xenon and tin gases are simulated and compared. Benchmarking of EUV signals and plasma parameters in both laser and Z-pinch devices is presented
One of the critical technological challenges of future tokamak fusion devices is the ability for plasma-facing components to handle both normal and abnormal plasma/surface interaction events that compromise their lifetime and operation of the machine. Under normal operation plasma/surface interactions that are important include: sputtering, particle implantation and recycling, He pumping and ELM (edge localized modes)-induced erosion. In abnormal or off-normal operation: disruptions and vertical displacement events (VDEs) are important. To extend PFC lifetime under these conditions, liquid-metals have been considered as candidate PFCs (Plasma-Facing Components), including: liquid lithium, tin-lithium, gallium and tin.Liquid lithium has been measured to have nonlinear increase of physical sputtering with rise in temperature. Such increase can be a result of exposure to ELM-level particle fluxes. The significant increase in particle flux to the divertor and nearby PFCs can enhance sputtering erosion by an order of magnitude or more. In addition from the standpoint of hydrogen recycling and helium pumping liquid lithium appears to be a good candidate plasma-facing material (PFM). Advanced designs of first wall and divertor systems propose the application of liquid-metals as an alternate PFC to contend with high-heat flux constraints of large-scale tokamak devices. Additional issues include PFC operation under disruptions and long temporal instabilities such as VDEs. A comprehensive two-fluid model is developed to integrate core and SOL (scrape-off layer) parameters during ELMs with PFC surface evolution using the HEIGHTS package. Special emphasis is made on the application of lithium as a candidate Plasma-facing liquid-metal.
Material selection and lifetime issues for extreme ultraviolet (EUV) lithography are of critical importance to the success of this technology for commercial applications. This paper reviews current trends in production and use of plasma-facing electrodes. insulators, and wall materials for EUV type sources. Ideal candidate materials should be able to: withstand high thermal shock from the short pulsed plasma: withstand high thermal loads without structural failure: reduce debris generation during discharge, and be machined accurately. We reviewed the literature on current and proposed fusion plasma-facing materials as well as current experience with plasma gun and other simulation devices. Both fusion and EUV source materials involve issues of surface erosion by particle sputtering and heat-induced evaporation/melting. These materials are either bare structural materials or surface coatings. EUV materials can be divided into four categories: wall. electrode. optical, and insulator materials. For electric discharge sources. all four types are required, whereas laser-produced plasma EUV sources do not require electrode and insulator materials. Several types of candidate alloy and other materials and methods of manufacture are recommended for each component of EUV lithography light sources.
The structure of a collisionless scrape-off-layer (SOL) plasma in tokamak reactors is studied in order to define the electron distribution function and the corresponding sheath potential between the divertor plate and the edge plasma. The collisionless model is shown to be valid during the thermal phase of plasma disruption, as well as during the newly desired low-recycling normal phase of operation with low-density, high-temperature, edge plasma conditions. An analytical solution is developed by solving the Fokker–Planck equation for electron distribution and balance in the SOL. The solution is in good agreement with numerical studies using Monte Carlo methods. The analytical solutions provide insight into the role of different physical and geometrical processes in a collisionless SOL during disruptions and during the enhanced phase of normal operation over a wide range of parameters.
Estimations and experimental studies on the possibility of capillary-pore systems with lithium as the first wall and divertor target plate plasma-facing material have been conducted in support of the lithium liquid metal fusion reactor concept. The possibility of the lithium-filled capillary-pore systems to withstand a high energy plasma flux has been demonstrated.
Damage to plasma-facing components (PFCs) and structural materials during abnormal plasma behavior such as hard disruptions, edge-localized modes (ELMs), and vertical displacement events (VDEs) is considered a serious life-limiting concern for these components. The PFCs in the International Thermonuclear Experimental Reactor (ITER), such as the divertor, limiter, and parts of the first wall, will be subjected to high energy deposition during these plasma instabilities. High erosion losses on material surfaces, high temperature rise in structural materials (particularly at the bonding interface), and high heat flux levels and possible burnout of the coolant tubes are critical constraints that severely limit component lifetime and therefore degrade reactor performance, safety, and economics. Recently developed computer models and simulation experiments are being used to evaluate various damage to PFCs during the abnormal events. The design implications of plasma-facing and nearby components are discussed, and recommendations are made to mitigate the effects of these events.
Laboratory experiments to simulate plasma disruptions have contributed significantly in many aspects to the understanding of the physical processes occurring during high-energy deposition on target material surfaces due to plasma instabilities. Laser light, electron beams, and plasma guns have been used worldwide to study disruption effects and erosion damage of candidate divertor materials. The differences among these simulation experiments are examined. The net power flux reaching the originally exposed surface depends on many parameters, such as type of energy deposited, target material, pulse duration, and geometrical factors. Experimental results have been evaluated and compared with theoretical predictions, and the overall relevance of simulation experiments to reactor conditions has been critically examined.
The question of the atmosphere of a space probe arising due to its motion near the Sun is considered within the framework of the "Solar Probe" project, and the effect of this atmosphere on local measurements of the parameters of natural plasma is discussed. Analysis shows that the concept of the "Solar Probe" project, in which the study; of mechanisms of solar corona heating is based on local (in situ) measurements of parameters of the medium, require's additional detailed verification using experimental, computational, and theoretical studies of materials for a protective screen. Along with this, the development of local-distant coronal plasma diagnostic methods is necessary; this would allow measurement of parameters of the medium in regions undisturbed by the atmosphere of the space probe.
Tritium behavior in plasma-facing components of future tokamak reactors such as ITER is an essential factor in evaluating and choosing a successful candidate for a plasma-facing material (PFM). One important parameter that influence tritium build-up and release in the Generated dust of PFMs is the effect of material porosity on tritium behavior. Diffusion in porous materials, for example, consists of three different diffusion processes: along grain boundaries, along micro-crystallites, and diffusion in pure structure crystallites. A model is developed to evaluate and assess the sensitivity of tritium accumulation and permeation of candidate materials due to porosity. Specific laboratory experiments relevant to reactor conditions, in currently existing and available facilities, are required to help in selecting the best candidate material.