How to model and simulate microgyroscope systems
IEEE Spectrum（1998）
摘要
An accurate physical model of a micro-electromechanical system can save valuable design time and slash the number of foundry runs needed for characterization. Using a set of existing simulators and field solvers, the authors developed a method for modeling the mechanical and electrical properties of their microgyroscope
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关键词
micro-electromechanical system,field solvers,electrical property,valuable design time,accurate physical model,microgyroscope system,finite element methods,simulators,physical model,etching,modeling and simulation,gyroscopes,silicon
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