Electrostatic Rotator For Alignment Purposes In Multi Electron Beam Systems

In single charged particle beam column the alignment is obtained either by mechanical shift of the lenses or by XY alignment deflectors. The problem in multi beam array systems is that it is only possible to deflect the array of beams in the XY direction and not able to correct for a possible rotation errors between arrays blocks. A new concept is presented here that can electro statically align multi beam array systems. (C) 2009 Elsevier B.V. All rights reserved.