The phase-locked interferometric method for nanometric position control

We proposed a nanometric position control method based on a home-made high frequency phase-shifting electronic circuit and a heterodyne interferometer. The displacements with steps of 4.94nm are presented. Repeatabilty of 0.075nm has been obtained over 1μm displacement range. Such method coud be used over milimeter range displacements in a controlled surrounding environment leading to numerous applications in nanometrology. © 2010 IEEE.