Nanochip: A MEMS-Based Ultra-High Data Density Memory Device

The paper provides an overview of a probe storage device development. The main results are related to successful development of ferroelectric memory, MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read write heads), demonstrating wear resistance of the tips, integration of memory material into the MEMS process, integration of MEMS cantilever process with CMOS, development of analog front end electronics, including read channel and servo system, and a controller for a storage device.