12.2: Solution Processable Passivation Layer for Active Matrix Thin Film Transistors on Rigid and Flexible Substrates

Ahila Krishnamoorthy,Richard Spear,Amanuel Gebrebrhan,Mehari Stifanos,Hai Bien,Marie Lowe,Deborah Yellowaga,Peter Smith,Shawn O'Rourke,Doug Loy,Jeff Dailey,Michael Marrs,Scott Ageno

SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS（2008）

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摘要

Organosiloxane based spin on planarizing dielectrics (PTS-E and PTS-R) were developed for application in flat panel displays as a replacement to conformal chemical vapor deposited SiNx. Here we demonstrate the successful use of siloxane-based material as a passivation layer for active matrix alpha-Si thin film transistors (TFT) on both rigid and flexible substrates.

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thin film transistor

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