Ionization effects in self-interstitial migration and implant damage annealing in silicon
Radiation Effects and Defects in Solids（1973）
关键词
electron spin resonance,ionization,diffusion,electron irradiation,ion implantation,annealing,interstitials,thermal annealing
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要