30.2: Active Matrix Electrophoretic Displays on Temporary Bonded Stainless Steel Substrates with 180 °C a-Si:H TFTs

SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS(2008)

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摘要
A low temperature, 180 degrees C, amorphous Si (a-Si:H) process on bonded stainless steel substrates is discussed and a 3.8-inch QVGA active matrix (AM) electrophoretic display as well as a 64x64 electrophoretic display with integrated column drivers are demonstrated. The n-channel thin-film transistors (TFTs) exhibited saturation mobilities of 0.7 cm(2)/V-sec, median drive currents of 26.2 mu A and low defectivity.
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