Geometrical design of an alignment mark for focused ion beam implantation in GaAs using Monte Carlo simulation of ion trajectories
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（1987）
关键词
monte carlo simulation,focused ion beam
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要