Formation of Pb(Zr, Ti)O3-Pb(Zn, Nb)O3 System Piezoelectric Thick Films in Low-Temperature Firing Process

Piezoelectric thick-films of 0.7Pb(Zr, Ti)O-3-0.3Pb(Zn, Nb)O-3 were prepared on ZrO2 ceramic substrates by firing the printed paste at 800-950 degrees C. As a source material for the paste, glass-ceramics composed of a lead-based glass and nucleation initiators of TiO2 and ZrO2 were used together with the mother material of Pb(Zr, Ti)O-3-Pb(Zn, Nb)O-3. The piezoelectric propel-ties were evaluated with a unimorph actuator formed on the ZrO2 thin substrate. The remanent polarization was 11 to 12 mu C/cm(2). The coercive field was 13 to 14 kV/cm and the piezoelectric constant d(33) was 260 to 320 pC/N. Thick-film material consisting of Pb(Zn,Nb)O-3 modified PZT powder and glass-ceramics containing nucleation initiators are very useful for obtaining densification in low-temperature firing and excellent piezoelectric properties.