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A 70GHz Manufacturable Complementary LC-VCO with 6.14GHz Tuning Range in 65nm SOI CMOS

San Francisco, CA(2007)

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摘要
A complementary LC-VCO is integrated in a 65nm SOI process and is statistically characterized on a 300mm wafer. Average center frequency is 67.9GHz and frequency tuning range is 6.14GHz or 9.05%. It achieves a phase noise of -106dBc/Hz at 10MHz offset and consumes 5.37mW from a 1.2V supply. The VCO yield is 94.7% for 70GHz operation.
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关键词
CMOS integrated circuits,millimetre wave oscillators,silicon-on-insulator,voltage-controlled oscillators,1.2 V,10 MHz,300 mm,5.37 mW,6.14 GHz,65 nm,67.9 GHz,70 GHz,CMOS,LC-VCO,phase noise,silicon-on-insulator
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