[Ca(Thd)2(Tetraen)]:  A Monomeric Precursor for Deposition of CaS Thin Films

CHEMISTRY OF MATERIALS(1997)

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摘要
[Ca-3(thd)(6)] (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) dissolved in hexane and in the presence of tetraethylenepentamine (tetraen) crystallizes as a 1:1 [Ca(thd)(2)(tetraen)] adduct complex in the orthorhombic Peen space group with a 10.874(2) Angstrom, b = 15.480(3) Angstrom, c = 20.866(4) Angstrom, and Z = 4. The molecule is monomeric with an 8-coordinated calcium atom. The adduct complex volatilized at lower temperature than the nonadducted complex. [Ca(thd)(2)(tetraen)] can be utilized as a precursor in growth CaS thin films by the atomic layer epitaxy method. The growth rate with [Ca(thd)(2)(tetraen)] is lower (0.43 Angstrom/cycle) than that with [Ca-3(thd)(6)] (0.50 Angstrom/cycle).
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thin film
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