Study on bulk acoustic wave delay line with 16-17 GHz delay line

Through optimizing high frequency and low loss transducer design, extra thin piezoelectric film deposition, microwave matching network, and EMC of high frequency hermetic seal package, a microwave bulk acoustic wave delay line operated at 16-17 GHz has been developed in this work. The bandwidth of 1 098 MHz, delay time of 0.358 μs, insertion loss of -54 dB, triple transmitting suppression(TTS) of 28 dB, feed through suppression of 44 dB have been achieved.