Effect of molecular weight on poly(methyl methacrylate) resolution

Electron-beam lithography's resolution limit is greater than the beam diameter due to resist limitations as well as electron interaction with solids. We examine the effect of molecular weight on the resolution of poly(methyl methacrylate) (PMMA). The experimental procedure uses thin Si3N4 in order to reduce the backscattered electron contribution to the exposure, and the resist contrast standard deviation sigma was determined. Molecular weights of 950x10(3), 120x10(3), and 15x10(3) amu were used. It is found that relatively equivalent exposure and resolution are found in each case, and that the entanglement threshold is either lower than thought, or is not a factor in the resolution of PMMA. Lines as small as 7 nm are found in the highest molecular weight. (C) 1996 American Institute of Physics.