Surface Structure of Molecular Beam Epitaxy (211)B HgCdTe

Journal of Electronic Materials(2007)

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摘要
The as-grown molecular beam epitaxy (MBE) (211)B HgCdTe surface has variable surface topography, which is primarily dependent on substrate temperature and substrate/epilayer mismatch. Nano-ripple formation and cross-hatch patterning are the predominant structural features observed. Nano-ripples preferentially form parallel to the [1̅11] and are from 0 Å to 100 Å in height with a wavelength between 0.1 μ m and 0.8 μ m. Cross-hatch patterns result from slip dislocations in the three 111 planes intersecting the (211) growth surface. The cross-hatch step height is 4 ± 1 Å (limited data set). This indicates that only a bi-layer slip (Hg/Cd + Te) in the 111 slip plane occurs. For the deposition of MBE (211)B HgCdTe/CdTe/Si, the reorientation of multiple nano-ripples coalesced into “packets” forms cross-hatch patterns. The as-grown MBE (211)B CdTe/Si surface is highly variable but displays nano-ripples and no cross-hatch pattern. Three types of defects were observed by atomic force microscopy (AFM): needle, void/hillock, and voids.
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关键词
HgCdTe,CdTe/Si,molecular beam epitaxy,atomic force microscopy,nano-ripple,nano-wire,cross-hatch
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