YAG laser percussion drilling of a functional multi-layer thin plate

An Au-coated Fe–Ni alloy thin plate was laser drilled by a pulsed Nd:YAG laser. The influences of laser parameters on the diameter of perforation, the outer diameter of crater and the roundness of the perforation have been investigated by employing scanning electron microscopy. The diameter of perforation increases gradually with an increase in pulse width from 0.3 to 8ms at the fixed average laser power and frequency, and increases with an increase in average laser power from 10 to 25W at the fixed pulse width and frequency. Some craters are found around the perforations because of the heat affecting of laser beam to the non-irradiated zone. The diametric difference of the perforation between the incident and the effluent sides is very small under the shortest pulse width of 0.3ms. Good roundness of the perforation can be achieved at either the lowest pulse width or the lowest laser power.