P-19: Development of Microcrystalline Si for TFT Backplanes

A new composite material based on directly deposited microcrystalline Si (μc-Si) was developed, tested and applied as active layer in top-gate coplanar p-type TFTs. The obtained TFT's characteristics demonstrate high quality of developed μc-Si and possibility of using it in TFT backplanes for AMOLED displays.