Effect of Isopropyl Alcohol Addition in Ozonated Water on the Corrosion of Tungsten Film

Acetic acid (HAc) or 2-propanol (IPA) was added to ozonated water vapor, and its, ability to clean corroded Al and W surfaces was studied. No changes to the surface morphology or film thickness were observed on any of the Al films to which the ozonated water vapor cleaning process was applied, either with or without the addition of HAc and IPA, No change in the W surface was observed when it was exposed to either pure ozonated water vapor or that which had HAc-added. However, the surface morphology of the W film changed, and its thickness decreased, when it was exposed to the ozonated water vapor with added IPA. It was also noted that no corrosion occurred on the surface of W when only IPA and the water mixture vapor were injected. Given that the pH of the water with added IPA was unchanged, regardless of whether ozone feeding had occurred, it can be concluded that the main reason for the corrosion of the W film is the accelerated oxidation of W. This accelerated oxidation is a byproduct of ozone decomposition in the presence of a radical promoter, rather than the enhanced dissolution of oxidized W. (C) 2009 The Japan Society of Applied Physics