16×16 Mirror type optical switch with integrated fiber alignment and steady switching state

This paper reports a micro electro mechanical system (MEMS) 16×16 free space optical switch based on high-reflectivity mirrors. The mirror monolithically integrated with the fiber grooves can enlarge its rotation angles up to 90°, and keep this as a steady state to steer the optical signal. The reflectivity of the mirror is measured to be 93.1 ∼ 96.3%. The smallest fiber-mirror-fiber insertion loss is 2.1 dB by utilizing optiFocusTM collimating lensed fibers. Moreover, only about ±0.01 dB oscillating amplitude of insertion loss is provoked after the device is tested for 15 min for 5 ∼ 90 Hz in the vertical vibration amplitude of 3 mm. In addition, excellent antifatigue performance of the mirror, which can endure more than 109 cycles of actuation, has been proven. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 3012–3016, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23879