Optimization of sublimation growth of SiC bulk crystals using modeling

Materials Science and Engineering: B(1999)

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摘要
Analysis of factors determining growth rate and shape of the crystallization front during sublimation growth of bulk SiC crystals is presented. For this purpose, mass transport of species in the graphite crucible coupled with global heat transfer in a sublimation growth system is studied. Specific features of the growth process in a tantalum container are discussed.
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关键词
Bulk crystals,Etching of graphite,SiC,Sublimation growth,Tantalum container
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