GROWTH STRUCTURES OF ELECTROLESS COPPER-FILMS FOR PRINTED WIRING BOARDS

RM KENNEDY, K MINTEN, XU YANG,DF EVANS

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures(1991)

引用 11|浏览1
暂无评分
摘要
Though a mature process, electroless copper deposition occupies an important economic and technological position in the electronics industry today. Virtually all multilayer circuit boards require the process for through hole connections enabling the miniaturization of the board to keep apace with the total electronics trend to higher densities and smaller components. This trend places more stringent requirements on adhesion of the copper and reliability of the film. The process itself consists of two deposition stages, a surface catalyzation with a palladium colloid followed by deposition of copper. The surface presents a composite substrate of greatly different materials on which adhesion is required: copper, silicate glass, and polymeric resins of diverse compositions. To facilitate study of surface structures, we have used highly oriented pyrolitic graphite as a substrate. Scanning tunneling microscopy (STM) has shown the incipient stages of the palladium catalyst and electroless copper. The results of STM investigations have revealed the nucleation, the microisland formation and the surface growth morphology. The surface composition at each step is identified by scanning tunneling spectroscopy. The surface structures and the defect formation on printed circuit board materials are also investigated by AFM.
更多
查看译文
关键词
printed circuit board,printed wiring board,scanning tunneling spectroscopy,scanning tunneling microscopy,crystal growth,materials science,surface structure,copper
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要