Passivation Layer Of Cdznte As Studied By Spectroscopic Ellipsometry

JOURNAL OF THE KOREAN PHYSICAL SOCIETY(2008)

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摘要
An oxidized layer was obtained on a cadmium zinc telluride (CZT) wafer by using chemical etching first in a KOH-KCl solution and then in an NH4F/H2O2 solution. The oxidized layer on the CZT obtained by using this method was analyzed by using ex-situ spectroscopic ellipsometry (SE) for the first time. In particular, the optical constants and the thickness of the chemical oxidized layer were obtained as functions of the oxidizing time.
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关键词
CdZnTe, Spectroscopic ellipsometry, Chemical passivation
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