III-V semiconductor nanowires for future devices

DATE(2014)

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摘要
The monolithic integration of III-V nanowires on silicon by direct epitaxial growth enables new possibilities for the design and fabrication of electronic as well as optoelectronic devices. We demonstrate a new growth technique to directly integrate III--V semiconducting nanowires on silicon using selective area epitaxy within a nanotube template. Thus we achieve small diameter nanowires, controlled doping profiles and sharp heterojunctions essential for future device applications. We experimentally demonstrate vertical tunnel diodes and gate-all-around tunnel FETs based on InAs--Si nanowire heterojunctions. The results indicate the benefits of the InAs--Si material system combining the possibility of achieving high Ion with high Ion/Ioff ratio.
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si material system,si nanowire heterojunctions,new growth technique,high ion,direct epitaxial growth,iii-v semiconductor nanowires,new possibility,small diameter nanowires,iii-v nanowires,gate-all-around tunnel,v semiconducting nanowires,future device,field effect transistors,si,silicon,doping,optoelectronic devices,heterojunctions,nanowires,epitaxial growth
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