Theoretical model for scanning electron microscopy through thin film windows

We have developed a model for electron beam scattering in a thin film window atmospheric scanning electron microscope (SEM). The model is accurate for plural scattering, which covers film thicknesses up to 100-mu-m and window to sample spacings to 20-mu-m, for energies above 20 keV. We demonstrate experimental verification of our model for energies from 20 to 50 keV and film thicknesses from 30 to 100 nm.