Investigation on the Interface Structure, Mechanical Properties, and Thermal Stability of TiAlSiN/TiAlN Multilayers

ACS applied materials & interfaces(2023)

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摘要
Recently, the TiAlSiN/TiAlN coatings with excellent mechanical and thermal properties have great potential for protective applications that face deteriorated service environments. Here, we systematically investigate the interface structure, mechanical properties, and thermal stability of TiAlSiN/TiAlN multilayers with varied Al and Si contents of TiAlSiN sublayer. Both Ti0.53Al0.38Si0.09N/Ti0.52Al0.48N (ML_1) and Ti0.48Al0.38Si0.14N/Ti0.52Al0.48N (ML_2) exhibit the face-centered cubic structure through epitaxial growth, whereas the Ti0.43Al0.48Si0.09N/Ti0.52Al0.48N (ML_3) shows a mixed cubic/wurtzite (c/w) structure. This mechanism is explored by first-principles calculations that the increased content of Al and Si within the TiAlSiN sublayer is detrimental to the formation of a coherent interface. Meanwhile, the change of interfacial structure leads to a variation in hardness from similar to 35.6 GPa of ML_1 to similar to 35.4 GPa of ML_2 and then to similar to 30.9 GPa of ML_3. In addition, ML_1 presents a delayed thermal decomposition by similar to 100 degrees C, compared to those of ML_2 and ML_3 multilayers.
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关键词
TiAlSiN/TiAlN coatings,TEM,interface structure,mechanical properties,thermal stability
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