Study of computer simulation on chiral spiral structure based on multi-beam interference lithography

Based on multi-beam interference theory, the chiral spiral structure by interference lithography is simulated, and several factors that can influence the structures are discussed. The simulation results indicate that there are different special effects of incident angle, polarization status, polarization direction and phase difference on the three-dimensional spiral structures. The computer simulation of photonic crystal provides an effective guidance for the experimental fabrication, and promotes the development and applications of chiral spiral structures.